Used OXFORD Plasmalab 80 Plus #9384679 for sale

OXFORD Plasmalab 80 Plus is a state-of-the-art etcher/asher that provides excellent control over critical etching and ashing parameters. Its advanced design ensures precise etching and ashing control in order to maximize process uniformity and device yields. The unit comes equipped with a precisely controllable circular magnetron antenna to ensure repeatable process parameters. Additionally, it has a multi-range power supply that provides very transient response to process parameters, allowing for rapid adjustments when needed. Plasmalab 80 Plus features an advanced vacuum chamber design that maximizes corrosion protection, as well as a variety of wafer transport mechanisms to provide efficient consistent etching and ashing processes. It is further equipped with several process monitoring and control systems, including a gas flow monitor, pressure regulator, and gas purity analyzer, to ensure consistent, reliable results. OXFORD Plasmalab 80 Plus offers advanced user interfaces that simplify operation and minimizes operator errors. The control equipment provides feedback on process parameters in real time and also allows for efficient data logging and analysis. For more complex etching, Plasmalab 80 Plus has several options available. A process gas blending system provides for efficient mixing of multiple gases and an automated gas calibration module minimizes process drift over time. An onboard oxygen monitor helps ensure that an inert gas process is used for critical applications. OXFORD Plasmalab 80 Plus is a versatile and powerful unit that is capable of providing excellent process uniformity and yields for a wide range of etching and ashing applications. Its advanced control systems and user interfaces simplify operation, while providing feedback on process parameters in real time. For more complex etching applications, a process gas blending machine and automated gas calibration module ensures reliable results and reduce process drift over time.