Used OXFORD Plasmalab 80 Plus #9412407 for sale

OXFORD Plasmalab 80 Plus
ID: 9412407
PECVD System.
OXFORD Plasmalab 80 Plus is an innovative etch/ash machine designed and developed by OXFORD Instruments. It is designed to be a high-performance, ergonomic, and cost-efficient tool for a variety of applications in the semiconductor, nanotechnology, and microfabrication industries. Plasmalab 80 Plus features a powerful etch/ash radio frequency (RF) generator, ensuring reliable and repeatable results. This generator produces an adjustable pulsed-DC or RF power for high-precision etch/ash operations. This high-power generator enables OXFORD Plasmalab 80 Plus to handle a wide range of materials, including non-metals, plastics, soft metals, and other metals. Its variable work table accommodates up to four substrates at once for more efficient processing. Plasmalab 80 Plus also features a coolant equipment, which keeps the temperature inside the chamber low and the surface of the etch/ash chamber cool. This coolant system reduces evaporation and increases process repeatability. Additionally, OXFORD Plasmalab 80 Plus provides a safety first approach with highly secure interlocks, ESD-safe connections, and RF-cage, which protect users and operators. Plasmalab 80 Plus is offered with Bertech's AutoEtch Unit, which allows the selection of up to five substrates to be possible remotely, with the touch of a button. This eliminates the need for an operator to manually select and change substrates. Additionally, the built-in recipes and machine parameters store library provides increased process repeatability. OXFORD Plasmalab 80 Plus has a wide variety of applications in microelectronics and micromachining technologies. It can be used for RIE etch/ash in the development of nanotechnology and electronics devices. It is also suitable for wet etching and dry etching/ ashing processes. Furthermore, Plasmalab 80 Plus can be utilized for plasma assisted deposition, metals and organic variants, as well as other surface treatment processes. Thus, OXFORD Plasmalab 80 Plus is an advanced etch/ash machine ideal for a variety of microelectronics and nanotechnology needs. Its reliable and repeatable results, wide range of materials, and easy to use features make it a great choice for both experienced and new users.
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