Used OXFORD Plasmalab 80 #293630465 for sale

OXFORD Plasmalab 80 is a state-of-the-art etching and ashing equipment capable of processing wafers, encapsulated dies and high aspect ratio substrates. This highly evolved system is one of the few on the market with a 200 mm high aspect ratio chuck, capable of offering all the necessary parameters for etching, ashing and plasma cleaning of micro- and nano-scale structures. The core of Plasmalab 80 is an added process chamber, which utilizes a novel digital scanner for homogeneous process distribution and a multi-point pressure control unit for precise pressure setting for consistent etching and ashing results. The machine also features a high-powered RF plasma source which provides generous amounts of plasma power needed to achieve critical etching, ashing and cleaning tasks with high plasma densities. The platform's 8-inch capacity allows for quick cycle times and improved throughput, while the unit's 250 kg double door tool provides enhanced wafer handling and improved safety. This Plasmalab model also boasts the capability to process multiple substrate types and sizes, allowing users to increase throughput and reduce downtime when handling different substrates. All of the asset's components are designed to collaborate with one another to enable precise temperature and pressure control for temperature-sensitive processes. This ensures reproducibility and high yields for various applications. The user friendly design is highly intuitive and customer-friendly, making the model easy to use. The Plasmabab 80 is a powerful etcher and asher solution that brings exceptional productivity and quality to high performance R&D laboratories. This cutting-edge Plasmalab model also offers a comprehensive recipe library to allow every operator to find a suitable process for any kind of material.