Used OXFORD Plasmalab 80 Plus #9260764 for sale
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ID: 9260764
Wafer Size: 6"
Vintage: 1997
Reactive Ion Etcher (RIE), 6"
Gases: SF6, CHF3, Ar, O2, N2, H2
Cryogenic head
Capable of etching at 77K (LN2 Temperature)
Goes up to 50°C (323K)
(3) Gas mass controllers with valves
Backing pump
1997 vintage.
OXFORD Plasmalab 80 Plus is an advanced reactive ion etcher (RIE) used in the microfabrication of electronic, optical, and biomedical devices. The etcher combines high-end performance, maximum compatibility and flexibility, and excellent user-friendly operation. The advanced equipment is equipped with an advanced computer-controlled platform, a high throughput double-chamber design, and a robust, ergonomic vacuum system. The unit's first-generation RIE technology is capable of delivering precise etching accuracy in a uniform, repeatable manner. It features a comprehensive computer-controlled interface with the possibility of adding multiple concurrent processes. Its high throughput architecture allows for fast etching of various materials such as metals, glass, and other hard materials. It also offers excellent compatibility with a variety of different materials, with both analog and digital platforms available. Plasmalab 80 Plus provides accurate depth profiling with a repeatable accuracy of 1.5 cm and a resolution of 0.2 cm. Its chamber is purgeable up to 1.103 mbar for complete removal of all process residues. Its advanced control machine enables precise control over all parameters including recipe selection, substrate temperature, RF power, RF frequency, DC bias, vacuum, flow rate, and more. Its insulation design ensures the optimal ionization conditions for reactive ion etching, providing uniform etch rates and enhanced selectivity. The manual gas flow control enables fine-tuning of etch rates and uniformity of the results. Additionally, the tool includes an integrated load-lock asset, which ensures secure material handling and automated process control during each cycle. OXFORD Plasmalab 80 Plus also features a wide range of accessories, such as wafer holders, coverings, and additional processing equipment. This allows for a customized setup according to specific customer requirements and makes it an optimal choice for a variety of applications. Overall, Plasmalab 80 Plus is an advanced and reliable reactive ion etcher model, delivering excellent precision and repeatability, allowing for perfect results in various applications. The equipment's flexibility and compatibility make it an ideal choice for any microfabrication process.
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