Used OXFORD Plasmalab 800 #293830575 for sale

OXFORD Plasmalab 800 is an advanced on-board etcher and asher. It includes an onboard high-resolution ion beam source and a built in reactive gas delivery equipment. It is designed to provide precision and accuracy in the etching and ashing processes, making it ideal for a wide range of applications. The etcher/asher has a high deposition etch rate of 5µm/min and can reach temps up to 1200K while improving selectivity, repeatability and edge definition. Plasmalab 800 has a wide range of process gases including FF, SF, CF4, CHF3, CF2Cl, CF 2Br, C 2F 2Cl 2 and C 2F 2Br. It also has a variety of pressure and temperature cycles available for a variety of substrate chemistries. OXFORD Plasmalab 800 is also equipped with a live monitoring system for its process parameters. This includes gas flow, deposition rate, deposition percentage, gas concentration, pressure, and temperature. It also allows for remote monitoring and can be used with a local network connection or accessed directly over the internet. The unit is self-contained, easy to operate and maintain. It has an intuitive graphical user interface (GUI) along with a comprehensive manual for operational setup and troubleshooting. It can accommodate 4" - 8" substrates up to 3mm in thickness and requires no cleaning after etching. Plasmalab 800 is a state-of-the-art tool for precision etching and ashing. The onboard high-resolution ion beam and gas delivery machine make it ideal for a wide variety of microfabrication applications. It is capable of rapidly and precisely producing process layers with excellent repeatability and edge definition. The built-in remote monitoring tool allows for easy diagnostics and maintenance. Together, these features make OXFORD Plasmalab 800 a powerful and highly valuable tool.