Used OXFORD Plasmalab DP 800 #293649543 for sale

ID: 293649543
Vintage: 1993
PECVD System Gases: SiH4, SiO2, Si3N4, N2O, NH3, H2, CF4, O2 (2) Rotary vane pumps Roots pump Turbo pump Dust filter RF Generator Vacuum gauge Controller Silane cracking oven Gasbox with MFC 1993 vintage.
OXFORD Plasmalab DP 800 is an etcher and asher designed to deliver precision etching and ashing techniques for a variety of applications. This highly advanced tool offers precise control over the etching, ashing and ion sputter processes, allowing users to obtain accurate patterns and features at a fraction of the time needed for comparable techniques. Plasmalab DP 800 is equipped with a high-performance DualPower source, which provides precise control over both the RF and DC power levels during the etching and ashing processes. This allows users to fine-tune their processes and fine-tune precise results. OXFORD Plasmalab DP 800 enables precise finite aspect ratio etching over a large range of aspect ratios. This etcher is designed to etch single or multi-level structures and it supports both isotropic and anisotropic etching. It is also equipped with a direct diode laser for controlling the depth of the etching; this allows for uniform and repeatable etching results. Plasmalab DP 800 is also capable of ashing with a variety of etching gasses, including oxygen, nitrogen and argon. This asher is equipped with a variable frequency RF power source that allows users to control the pulse duration and frequency of their ashing processes. This helps to achieve precise results, as well as improved reliability and repeatability. Overall, OXFORD Plasmalab DP 800 is an advanced etcher/ asher that provides an excellent combination of speed, accuracy and repeatability. Its ability to etch and ash with great precision and precision control makes it a powerful and highly popular tool within the semiconductor industry. Its features, along with its excellent performance, make Plasmalab DP 800 etcher and asher an ideal choice for a variety of applications.
There are no reviews yet