Used OXFORD Plasmalab PRS900 #293640277 for sale

OXFORD Plasmalab PRS900 is a robust, high performance etcher / asher that is designed to provide users with the capability to precisely etch and asher a variety of materials. The etcher / asher is a multi-functional tool that is capable of etching, ashing and etch-cleaning a variety of materials and substrates. It features both an etch chamber and an asher chamber. The etch chamber has a rastered radio frequency (RF) source and a vacuum capability, which allow for precise, accurate etching. The asher chamber also has a RF source, with both DC and RF power for trim ashing. The etch process is initiated in the PRS900 by introducing a working gas and substrate material into the etch chamber, where they are exposed to the RF source. This function causes material-removal rates to depend on the parameters such as substrate type, gas type, gas pressure, gas flow rate, and substrate etching exposure time. The asher chamber uses a direct current (DC) and RF source to trim the samples to the desired size, with a trim shape concentric with the etch chamber. The PRS900 also has a closed-loop process control system, which uses pressure, time, and temperature to finely tune the etching and ashing processes. The PRS900 boasts a range of unique features such as a removable process chamber for flexible recipe programming, automatic cool-down, system protection over temperature, gas mass flow computation to ensure reproducible results, and a RF matching circuit for optimized plasma generation. All these features ensure that the etcher / asher is ready for both standard and customized etched profiles that can reach a variety of depths and feature sizes. Plasmalab PRS900 is a versatile tool for both small and large scale etching and ashing projects. It offers an array of features for improved precision and accuracy, meaning that users can now carry out complex etching and ashing tasks with ease. With optimized plasma generation, reproducible results and flexible recipe programming, the PRS900 makes etching and ashing easier than ever before.