Used OXFORD Plasmalab System 90 #293605091 for sale

ID: 293605091
PECVD System.
OXFORD Plasmalab Equipment 90 (P90) is a high-quality etching/ashing etcher designed for IC and general microfabrication applications. This advanced etcher/asher is ideal for precision etching and related applications. The P90 is equipped with a single gas flow system which enables precise and efficient etching of delicate structures, whilst maintaining high process yields. The P90 offers a uniquely-designed chamber with a vacuum-level of up to 1×10-6 Torr, ensuring an optimal etching environment for the etching process to take place. In addition, the P90 has integrated heaters and coolers, allowing different thermal patterns to be created during the etching process, thereby enabling precise and high-resolution structures. Additionally, a built-in automated shutter is featured, providing real-time control of gas flow rate. Furthermore, the P90 has an efficient and reliable interlock unit which prevents the etching process from occurring in the absence of specific criteria being met. Additionally, the chamber in the P90 is designed for efficient loading and unloading capabilities of the wafers by a robot arm, as well as having a manual specimen loading and unloading device. Plasmalab Machine 90 features an intuitive operating tool which is user-friendly and allows operators to quickly become accustomed to its features. The console displays real-time data, such as the sample's profile and status, and chamber pressure. Operators can easily read the chamber pressure and adjust asset parameters. In addition, the P90 is equipped with an advanced software model which supports remote-access programs, allowing users to monitor and control equipment parameters via an Ethernet connection. The software of the P90 features comprehensive remote-control capabilities and a comprehensive fault-finding function to minimize downtime and batch waste. Built by OXFORD Instruments, OXFORD Plasmalab System 90 is the perfect etcher/asher for IC and general microfabrication applications. With a range of advanced process capabilities and its easy-to-use operating unit, the P90 provides unparalleled quality and performance for the production of complex structures.
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