Used OXFORD PlasmaPro 100 Cobra #293830475 for sale
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OXFORD PlasmaPro 100 Cobra is an advanced plasma etcher/asher equipment designed for semiconductor fabrication, MEMS (Micro-Electro-Mechanical Systems) manufacturing, and research applications. This versatile tool is equipped with numerous features and capabilities that enable precise and controlled plasma processing of a wide range of materials. PlasmaPro 100 Cobra is a high-performance tool that offers a range of plasma processing modes, including etching, ashing, deposition, and cleaning. The system is capable of handling various process gases such as oxygen, fluorine-based gases, and other reactive gases, allowing users to tailor the plasma chemistry to achieve the desired material removal or modification. One of the key features of OXFORD PlasmaPro 100 Cobra is its advanced plasma source technology. The unit is equipped with a high-density plasma source that enables efficient and uniform plasma generation across the process chamber. This results in consistent and reliable process results, ensuring high process repeatability and control. PlasmaPro 100 Cobra offers a range of process control options, including RF power control, gas flow control, pressure control, and temperature control. Users can optimize the process parameters to achieve the desired etch rate, selectivity, and profile control for specific device structures. The machine features a highly configurable process chamber with options for single wafer processing or batch processing. The wafer chuck design allows for secure wafer clamping and efficient heat transfer during processing, ensuring uniform processing across the wafer surface. OXFORD PlasmaPro 100 Cobra is equipped with a user-friendly interface that allows for easy programming and control of process recipes. Users can define process sequences, set process parameters, and monitor real-time process data through the intuitive software interface. The tool is designed with safety features such as gas leak detection, overpressure protection, and interlocks to ensure user safety during operation. PlasmaPro 100 Cobra also features a robust vacuum asset that enables fast pump-down and stable process conditions. OXFORD PlasmaPro 100 Cobra is a highly reliable and cost-effective tool that offers low cost of ownership and minimal maintenance requirements. The model is designed for high throughput and productivity, making it ideal for both research and production environments. In conclusion, PlasmaPro 100 Cobra is a state-of-the-art plasma etcher/asher equipment that offers advanced features, precise process control, and high performance for a wide range of plasma processing applications. Its versatility, reliability, and ease of use make it a valuable tool for semiconductor fabrication, MEMS manufacturing, and research laboratories.
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