Used OXFORD PlasmaPro 800 Plus #9412285 for sale

OXFORD PlasmaPro 800 Plus is an etcher/asher, specially designed for high speed etching of semiconductor substrates. The high speed etching tool is equipped with advanced microwave and RF plasma technologies, which enable faster etching with higher yields and accuracy. PlasmaPro 800 Plus features a large-area worktable with four quartz-halogen reflectors that enable high power delivery across the entire surface. The reflectors are coated with a special dielectric material to prevent creation of micro-discharges and to ensure a uniform and precise etching process. OXFORD PlasmaPro 800 Plus is equipped with four RF sources operating in the 13.56 MHz microwave frequency range. Each of these four RF sources has a single RF output that can be configured for either etching or ashing. The tool also offers additional resources for configurable power delivery and control, enabling greater accuracy and flexibility for different etching processes. PlasmaPro 800 Plus also features a high-precision precision staging mechanism that is designed to accurately adjust the position of the substrate. The precision movement is regulated by a micro-motor servo that is equipped with a dual-axis adjustment and a high-resolution encoder. This ensures that substrates remain level while executing the etching process. Another distinguishing feature of OXFORD PlasmaPro 800 Plus is its advanced process monitoring and control systems. It features a range of monitors, such as a real-time plasma intensity monitor, process time monitor, and substrate temperature monitor, to provide real-time feedback on the etching process. It also contains a process control system that allows users to accurately adjust the etch parameters for specific process conditions. PlasmaPro 800 Plus also includes a comprehensive process database, which allows users to store and retrieve processing data with ease. Data can be quickly and easily retrieved from non-volatile memory and is organized according to specific process conditions. OXFORD PlasmaPro 800 Plus is an essential tool for high speed, accurate etching of semiconductor substrates. It is equipped with advanced RF and microwave plasma technologies, a sophisticated staging mechanism, and a comprehensive process database. The tool also features a range of monitors and a process control system that allow users to adjust and monitor the etching process in real-time. This provides users with greater control, accuracy and flexibility.