Used OXFORD PlasmaPro NGP 1000 #293591973 for sale
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OXFORD PlasmaPro NGP 1000 is an etcher and asher that is designed and manufactured by OXFORD Instruments. It is a highly versatile, automated plasma processing equipment that is optimized for high-quality, reproducible and cost-efficient processing of a variety of thin film materials. The system is suitable for processing a wide range of materials such as Silicon, GaAs, SiO2, SiNx, and others, enabling the production of high-performance medical, optoelectronic and microelectronic device components. The NGP 1000 offers high-speed plasma nitriding, directional oxidation and wafering capabilities in a compact, cost-effective and easy-to-use platform that is ideal for R&D and pilot production laboratory operations. The instrument is fitted with a 20cm-diameter, low temperature processing chamber, which is optimized for uniform plasma processing under ultra-low deposition temperatures. An active cooling unit maintains a consistently low temperature profile inside the chamber, enabling high throughput processing, and providing reliable, repeatable results. Equipped with OXFORD Instruments' industry-leading ProCESS control software and productivity-enhancing wafer handling, the NGP 1000 offers the users an automated solution for highly precise, reliable and repeatable etching and deposition processing. The machine is designed for easy, repeatable operation and consistent process results, with automatic gas and tool diagnostics, as well as advanced control of the process parameters including pressure control, RF generator control and fast wafer recipes. The NGP 1000 is designed to be low maintenance and features a self-cleaning ion source to reduce asset downtime and lower operational costs. The instrument is also equipped with an advanced safety model and is suitable for use in a Class 100 cleanroom, giving users the confidence that their experiments and research are performed safely, reliably and with the highest quality. With its optimized design, high repeatability and low operating costs, OXFORD PLASMA PRO NGP1000 is an excellent choice for etching and wafering operations in a wide range of industries.
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