Used OXFORD PlasmaPro NGP 1000 #293636250 for sale

OXFORD PlasmaPro NGP 1000
ID: 293636250
Wafer Size: 12"
PECVD System, 12".
OXFORD PlasmaPro NGP 1000 is a high-precision Plasma Asher/Etcher designed to provide exceptional results in etching and ashing applications. It utilizes a low-voltage medium frequency power supply to provide a highly stable power output. Furthermore, its advanced RF power generator and Paschen's Law stabilization techniques ensure superior etching and ashing performance. The NGP 1000 is equipped with an intuitive control equipment to enable easy operation, and secured by an integrated safety system for hazard prevention. The NGP 1000 is capable of generating deep etching with extremely fine lateral resolution, uniform etching profiles and smooth aspect ratios with superior repeatability. The high-precision etcher is integrated with a closed-loop mass flow controller for accurate control of the chamber pressure, from low vacuum to ultra-high vacuum, allowing for accurate etching processes. It also features a chamber temperature control unit to maintain a uniform temperature throughout the entire etching and ashing process. Furthermore, the NGP 1000's chamber size is capable of accommodating substrates up to 12 inches in diameter. The device's forward RF-bias features a selectable delay time and the simulation capability of multiple pulse envelops to provide the perfect selections for different etching applications. Additionally, the backside substrate heating machine can be used to suppress the generation of undesirable particles, while the integrated high-precision robot can be used to execute precise pre- and post- etching operations. The uniform ion flux delivery tool of the NGP 1000 guarantees an optimum etching depth and profile, as well as consistent result reproducibility. Furthermore, the versatile etcher is compatible with a range of gas mixtures, including Argon, Fluoride and Carbon. This ensures that the NGP 1000 can be used for a wide range of applications, from basic etching to deep etching of metal and non-metal materials. Overall, the NGP 1000 is an ideal choice for high-precision, repeatable etching and ashing applications in an industrial environment.
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