Used OXFORD PlasmaPro NGP 1000 #293765806 for sale
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ID: 293765806
Wafer Size: 8"
Vintage: 2012
PECVD System, 8"
Load Locked Chamber
System PC, Keyboard, Mouse
X20 PLC
Chamber heating kit
Dual frequency RF
HF RF Generator
LF RF Generator
490 mm Diameter Aluminum Lower Electrode
Gas-shock assisted chamber lift mechanism
Dry pump
Load lock vacuum pump
Operations manual and documentation
X20 External Gas Box
2012 vintage.
OXFORD PlasmaPro NGP 1000 is an advanced etcher and asher suitable for a wide range of materials aplications. It features a powerful 1 kW source that enables precise and efficient etching and ashing of wafers up to 4 inches in diameter. Additionally, the NGP 1000 has a quick RF source switching that allows for a seamless transition between processes, making it suitable for a number of increasing etching/ ashing needs. The NGP 1000 has a temperature range of -50°C to +50°C which enables it to etch and asher a variety of materials up to 1.6mm thick. Additionally, it boasts an industry-leading 400MHz Frequency- and 0.9s Pulsing Resolution that improves precision and accuracy in the etching process. The advanced hardware also allows for precise gas pressure control, enabling a more consistent process and better quality results. The robust and efficient design of the NGP 1000 allows for a wide range of applications that span from fast etching to low temperature processing. The equipment also includes a number of advanced features such as parallel processing capability and real-time process monitoring, which makes it well-suited for highly specified etching and ashing needs. In addition, the NGP 1000 is equipped with an integrated FOUP wafer carrier, allowing it to load and process up to eight wafers at a time. The NGP is also fully compatible with OXFORD System Control software, which provides users with full control over the unit's various features and parameters. This software allows users to create and store numerous process recipes and monitor the results in real time. Furthermore, the software comes with a range of features that make it easy to monitor and control the machine as well as safely store recipe data. Overall, OXFORD PLASMA PRO NGP1000 is a professional etcher and asher equipped with a powerful 1 kW source, precise gas pressure control and advanced hardware that make it suitable for a variety of applications. It also includes a number of advanced features, such as parallel processing, FOUP wafer carrier and Oxfords' Tool Control software, that make the NGP 1000 an ideal choice for precision etching and ashing needs.
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