Used PANASONIC PC30B-HS #293615437 for sale

PANASONIC PC30B-HS is an efficient, high speed etching and ashing equipment for semiconductor device manufacturing. It features a large shelf capacity, capable of holding up to 200 8-inch (or 12-inch) wafers per process run. PC30B-HS consists of five independent process chambers which are linked together forming a large system with a single controller. The chambers are designed in a horizontal/vertical arrangement, allowing for the maximum capacity with an optimized workspace. Each process chamber is loaded in vertical orientation, with individual heaters per chamber. The unit provides a selection of process programs, single recipe functions, and a range of control parameters to be programmed directly within the machine itself. This allows maximum control of the process, enabling optimal etching or ashing results. Additionally, users have access to a suite of remote operations and predictive maintenance tools, which can instantly detect any potential malfunctions and inform the operator of any necessary action. In terms of operating parameters, PANASONIC PC30B-HS is capable of etching and ashing at a set temperature of up to 2000 degrees C. Operating pressure is adjustable between 0 and 0.10MPa, or 1.0MPa for etching. Process times can be set from 1 to 999 seconds, and up to 4999 second for etching. Additionally, the tool is equipped with an automatic gas delivery asset which is capable of accurately controlling the flow of process gases for a safe, clean, and consistent process. For user monitoring, PC30B-HS is equipped with an advanced user interface which displays the current process parameters and is programmable to trigger alarms when certain thresholds are met. This combined with the real-time temperature monitoring and internal model diagnostics, guarantees consistent and optimal ashing results. Furthermore, the equipment is compliant with the J-STD-004, which is an industry-recognized standard for etching and ashing safety and quality control. Overall, PANASONIC PC30B-HS is a reliable, efficient etching and ashing system, capable of providing a consistent and optimal process. Its intuitive user interface, combined with the advanced monitoring systems of the unit guarantee an optimal process. As a result, PC30B-HS is an ideal choice for any semiconductor device manufacturing facility.