Used PHOENIX RE-200 #9042770 for sale

PHOENIX RE-200
Manufacturer
PHOENIX
Model
RE-200
ID: 9042770
Wafer Size: Up to 5"
Vintage: 1998
Rotary etcher, up to 5" (2) Tanks (450 x 280 x 220 mm) Air 4 at., water 40 1/min, 3.5 at. 220 V / 30 A / 50 Hz 1998 vintage.
PHOENIX RE-200 is an advanced etcher/asher designed for a variety of industrial and research jobs and laboratory operations. This advanced equipment combines etching and ashing capabilities to provide efficient and reliable results in an effortless manufacturing process. The system features dual chamber designs with load-lock facilities, enabling the etching and ashing to be carried out simultaneously or consecutively. The efficient design of RE-200 includes 6 all-directional lift pins, allowing for fast loading and unloading without the need for active gas transport or substrate clamps. The chamber is temperature-controlled and temperature-stabilized to ensure uniform etching. The vaporization chamber features a removable vaporizer with low maintenance cost. The vaporizer also features low-energy consumption and the ability to process large substrates. The etching capabilities of PHOENIX RE-200 include both memory devices and logic devices, with the ability to fine tune parameters for improved manufacturing results. The plasma production unit and automatic gas supply enable precise etching and ashing using a wide array of gases. The machine can also support vacuum baking and vacuum priming for transistor fabrication. The ashing capability of RE-200 uses a powerful temperature-controlled RF generator to remove organic materials within the ashing chamber. Drainage of the and byproducts is automated, with the etching gas purification capabilities allowing for no-taint residue. The tool also offers four-stage pumping for ultimate vacuum control in the ashing process. PHOENIX RE-200 offers portability and ease of use, with a single-phase power connection for reliable operation. The asset also features low pressure operation with reduced corona gas consumption and waste generation. The model offers LCD display and color-coded touch screen buttons for easy operation and monitoring of the process. The equipment is also compliant with CE and CSA standards, ensuring compliance with the highest safety and quality standards.
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