Used PLASMA ETCH PE-100 #293731022 for sale
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ID: 293731022
Plasma etcher
Generator: 300 W, 100 KHz
No chiller
Control system: Process sequencing
Mass flow controller gas control: 0-50 cc
Vacuum gauge: 1-2000 mT
Vacuum pump: 8CFM 2-Stage direct drive oil pump with oil mist coalescing filter
6061-T6 Aluminum chamber
Chamber dimensions: 12" x 14.5" x 12"
Power supply: 120/240 V.
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