Used PLASMA ETCH PE-200 #293778285 for sale

PLASMA ETCH PE-200 is a tabletop source capable of providing impeccable etching and ashing applications for a wide range of materials. This precise instrument utilizes a combination of electrical and inert gas discharge to deliver consistent removal of materials with minimal heat exposure and no thermal shock for fragile substrates. At the core of PE-200 are three independent and interlocked systems - the etch module, the pump module and the gas supply module. The etch module consists of a vacuum release valve, a magnetron source, custom inductors to match the various operational configurations, and a low voltage plasma chamber for uniform plasma generation. Custom inductors enable an efficient energy transfer from the magnetron to the substrate and ensure consistent etch rates. The pump module has a turbomolecular pump with a holding tank for the gas, airlocks, and different vacuum gauges. This helps to maintain the integrity of the system when changing or adding gas. Additionally, the gas supply module features shut off valves, collector and carrier gas supplies, and neutral pressure regulators. Other features of PLASMA ETCH PE-200 include high etch rate capabilities, fast pump down rates, and near room temperature operation. As a result, the system offers low cost-per-wafer etching with precision and repeatability. As such, it can be used for dry etching, ashing, and chemical vapor deposition (CVD) applications on a variety of materials such as silicon, silicon nitride, tungsten, aluminum, and other metals. In addition, PE-200 has an integrated safety design with emergency shut-down circuit, an automatic pressure control system, and self-performance testing. This helps to minimize accidents, malfunctions, and down time. It also has a movie playback function which can be used to check the operation history by playing back the movie saved during the process. PLASMA ETCH PE-200 is also compliant with SEMI S2 standards, which provides a safe and compliant operating environment for the user. Overall, PE-200 is an advanced tabletop source that offers precise etching and ashing applications with superb repeatability and reliability. Its powerful combination of precision etch and ashing with fast and safe operation, make this tool an invaluable addition to any R&D laboratory or manufacturing facility.