Used PLASMA SYSTEMS DES 212 #9123081 for sale
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PLASMA SYSTEMS DES 212 is an advanced etcher and asher designed for laboratory and production use in a wide range of industries and applications. The etcher and asher features a robust construction, designed for reliable operation in a variety of harsh industrial environments. It is highly configurable and is suitable for a wide variety of processes such as etching, ashing, plasma cleaning and deposition. PLASMA SYSTEMS DES-212 is designed with a modular and expandable workstation layout for custom fitting into any process. The plasma generator and chamber are connected to a main console with two temperature-controlled components. The temperature can be adjusted for different process applications. A variety of process gases can be used, including SF6, CO2, O2, N2, Ar, and others. The equipment can operate in either, RIE or BAT (batch process) mode. DES 212 supports a wide variety of process variables and can be programmed for specific process requirements. The system includes a digital readout and computer-controlled data acquisition for improved process control and process optimization. The embedded software enables automatic control and data collection for more precise process control and further optimization. The unit is designed for precise and repeatable process control with a wide range of parameter settings, including voltage and current bias, plasma and etch gas flow, process temperature, pressure, humidity, etching and cleaning cycle times and more. The temperature uniformity of the working chamber is maintained with a patented reflow management machine. The tool is also equipped with a built-in safety asset, with an interlock for preventing personnel from being exposed to risk. DES-212 is ideal for high-throughput batch processing, and is compatible with a variety of process chambers including single and multidimensional processing vessels. It provides a wide range of features that improve upon conventional technology, such as enhanced process control with sophisticated computer-controlled data acquisition, improved process uniformity with reflow management, ease of use with intuitive user interface controls, and increased safety with a built-in interlock model.
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