Used PLASMA-THERM VLR700G1 #9352047 for sale

PLASMA-THERM VLR700G1 etcher and asher equipment offers a complete, precise solution for high-precision etching and ashing processes. It provides a powerful, single-chamber etching and ashing platform equipped with powerful, programmable pulse plasma sources. The system is designed to maximize uniformity across the full etch/ash zone, with a dual bake-off technique to reduce time and cost of etching and ashing. The dual-energy pulse sources ensure rapid edge profiling and rapid surface cleaning. The high-sensitivity control systems enable precise power delivery and control of all etch/ash parameters, and enable repeatable, reliable results. The customizable recipe generation within the on-board software allows repeatable processes and precise results. The multi-chamber RF power delivery in the unit allows efficient and reproducible etch or ash depth. The high-precision heating process also produces well-controlled and known diffusion within the sample. The sophisticated gas distribution process within the plasma chamber further ensures reproducible results, as well as clean etch and ash conditions. The machine is also designed for optimized utilization and clarity of process parameters. The graphical user-interface enables easy and intuitive work-flow configuration, from recipe generation to substrate preparation and process control. The data collection and process analysis tools create comprehensive, consistent control scheduling and monitoring. To conclude, with enhanced process control and precise results, VLR700G1 etcher and asher tool is an ideal solution for modern etching and ashing needs. It provides an efficient, economical, and reliable solution for etching and ashing processes.