Used PLASMATHERM 700 VLR (Versalock) #9123991 for sale
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ID: 9123991
Wafer Size: 8'
Vintage: 1995
PECVD system, 8"
(1) LM/TM module
(2) PECVD module
(5) MKS Mass flow controllers
RFPP-RF5S RF Power supply
Leybold dryvac 50P
Plasmatherm operating software
208V, 60Hz, 3 phase
1995 vintage.
PLASMATHERM 700 VLR (Versalock) is a high-performance plasma etcher designed for a wide variety of semiconductor applications and materials, including both metals and dielectrics. It is capable of etching areas up to 350μm for demanding device production. The Versalock equipment employs a vacuum and gas pressure mechanism that can be precisely tuned to the exact parameters necessary for the process. PLASMATHERM 700 VLR features a proprietary PCX process chamber with optimized gas flow controlling system. This unit provides superior etch uniformity over that of more conventional plasma etching systems. The Versalock also features automatic real-time control of etching temperature, line break compensation, voltage output matching, and a patented plug-and-play gas injection machine. This tool eliminates the need for external flow controllers and instantly locks flow rates. PLASMATHERM 700 VLR also features an automated heating and cooling asset which takes advantage of the properties of gas-cooled non-thermal-imaging plates. This enabled the model to precisely control the etch rate of both single level and multi-level chip designs. The Versalock is particularly suitable for small feature etching of high aspect ratio structures without edge rounding or sidewall taper. The equipment is also capable of producing channels ranging from 200nm to 500nm with low roughness and vertical sidewalls. It can be used for both single-sobek and cascade etch concepts. The Versalock also has a built-in charge neutralization system, which eliminates impurity accumulation in the chamber during the etching process. PLASMATHERM 700 VLR has a variety of safety features such as overvoltage protection, overcurrent protection, chamber pressure control, and 3D interlock. Its containment lid unit further improves safety by preventing dangerous reactions from occurring while the machine is in operation. The Versalock also features a easy-to-use Graphical User Interface which allows the operator to easily adjust the parameters of the etching process. In conclusion, PLASMATHERM 700 VLR (Versalock) is an advanced etching tool designed for a variety of applications and materials. It features an easy-to-use Graphical User Interface, a patented plug-and-play gas injection asset, and an automated heating and cooling model. With its range of safety features and precise etching capabilities, the Versalock is an ideal solution for a variety of demanding semiconductor applications.
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