Used PLASMATHERM 700 VLR (Versalock) #9293223 for sale
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ID: 9293223
Vintage: 1997
PECVD system
LM/TM module
(2) RIE Modules
(5) MKS Mass Flow Controllers
RFPP-RF5S RF Power supply
LEYBOLD Dryvac 50P
208V, 60Hz, 3 Phase
1997 vintage.
PLASMATHERM 700 VLR (Versalock) is a robust and reliable etcher/asher designed for advanced high-precision processing in the semiconductor industry. It is equipped with the latest technology, such as multiple temperature control system, to guarantee repeatable, traceable processes that produce superior results. The etcher/asher employs five independent temperature zones, each with its own independent digital controller. This ensures accurate temperature control and precise thermal properties on the micro-structure horizon. PLASMATHERM 700 VLR also features a powerful magnetically-activated locking mechanism. This ensures that the loading system and the process chamber remain securely locked, allowing for secure and stable operation. The Versalock feature also provides a reliable and repeatable process without the need of manual resetting or adjustment. PLASMATHERM 700 VLR employs a two-stage mechanical pump to provide low-dissipation and low-turbulence processing. The ultra-low consumption conditions reduce both etch and material costs, allowing for improved cost efficiency. In terms of safety, PLASMATHERM 700 VLR has been equipped with both a mechanical interlock and a process sealing feature. The latter allows operators to safely work behind closed doors, thus providing a safe environment for their personnel. PLASMATHERM 700 VLR also features a user-friendly graphical interface system, allowing operators to monitor and control the etching progress. With a variety of preset recipes, the user can perform multiple etching processes without manual intervention. Overall, its advanced technology, robust design, and user-friendly interface make PLASMATHERM 700 VLR an excellent choice for semiconductor etching and ashing. This etcher/asher offers improved productivity, reliability, and a minimal cost of consumables.
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