Used PLASMATHERM 7200 #9124185 for sale
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ID: 9124185
Vintage: 1991
Large batch chamber
RIE Electropolish the stainless steel
lower electrode powered: 30-32"
Shower head height
(5) Brooks 5850e MFCs
BCl3 process for backside via etching of GaAs wafer
RF20F power supply with matching network
Leybold 360 turbo with controller
Edwards EM40 with 250 blower
Upgraded to PC controller
1991 vintage.
PLASMATHERM 7200 is a state-of-the-art etching/asher equipment designed to give users precision and speed for high throughput processing. The system is suitable for various types of etching operations such as PCB material etching, photomask etching, and MEMS fabrication. 7200 utilizes a high-current, high-frequency power supply to deliver accurate and repeatable results. It features a in-line plasma torch, which provides improved process control and reliability. The torch is supplied with a set of specifically designed nozzles for optimal performance and process latitude. The unit also features a retractable chamber, which provides easy access to the part and minimizes contamination. The machine is capable of performing a wide variety of etching techniques at high speeds. Its wafer cassette and tilt carrier configuration enables non-contact etching and precise resist patterning. Furthermore, its process control software ensures repeatability and accuracy even when dealing with vulnerable substrates. The tool is also highly customizable, with a range of optional parts and accessories available, such as mask holders, dicing blades, special holders, and additional nozzles. It is also compatible with a variety of gases, such as SF6, O2, SF4, and H2. PLASMATHERM 7200 is a robust and reliable asset with a wide range of capabilities. Its advanced features and control software give users the ability to quickly make rapid and precise etching operations. The model's module-based architecture allows for future upgrades, ensuring that the equipment remains up-to-date with the latest technological advancements.
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