Used PLASMATHERM 7300PE #9042738 for sale
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ID: 9042738
Wafer Size: 8"
Vintage: 1996
PECVD System, 8"
Main frame
Transformer
Power supply
M-405-V-AC Unit
(4) Cartons
1996 vintage.
PLASMATHERM 7300PE is an advanced etching / ashing system designed for the industrial and research markets. The unit features programmable temperature ranges (450-600°C) and independent infrared and microwave heating, enabling precise control over sample processing parameters. Additionally, the manifold heater section and RF generator are driven independently for optimal source power and working pressure level balance. The system is suitable for etching / ashing a range of materials including silicon, gallium arsenide, and diamond-like carbon (DLC) coatings. It utilizes UPEC (Universal Parallel Etch Control) technology to enable optimal etch rates and repeatability. This technology tracks the etch rate during the process and controls the flow of chemistry accordingly for consistent results. 7300PE is equipped with various safety features, including automatic manifold shut-off valves, motorized source throw-off switch, and oxygen monitors. The digital controls are user-friendly, allowing for remote operation and unattended etching. Additionally, a Data Harvesting Program allows users to monitor chemical flow rates, temperatures, pressures, and other process parameters. PLASMATHERM 7300PE combines high transfer etching rates with reliable process control, making it an ideal solution for industrial and research applications. The unit is designed to be easy to install, operate, and maintain. Additionally, its corrosion-resistant construction makes it robust, durable, and suitable for harsh environments. Its advanced features and superior performance make it the perfect choice for precise, highly reliable etching / ashing.
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