Used PLASMATHERM 770 ICP #9124019 for sale
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ID: 9124019
Vintage: 2001
Ion coupled plasma etcher
Load lock shuttle lock transfer
Single chamber ICP
Watlow heater
Power supply: RFPP – RF5S & 20M
Electrode: 8.31”
Electrostatic chuck: 6"
(6) MKS MFCs-(O2, N2, Cl2, BCl3,Ar,spare)
VAT PM-5
He backside cooling
Neslab 75W
Turbo pump
Leybold D16B
Leybold D40BCS
Plasmatherm windows OS
2001 vintage.
PLASMATHERM 770 ICP is an etcher/asher equipment designed for high-speed and high-precision machining. It is a compact system that is ideal for a variety of applications, including surface etching, anisotropic etching of dielectric layers, and backside etching of circuit board layers. The unit is particularly suitable for rapid prototyping, because it requires minimal setup time and can easily be scaled to accommodate large quantities of material. 770 ICP features an inductively coupled plasma (ICP) source that generates a high-density plasma, which is essential for high-precision etching applications. The plasma is generated in the vacuum Class 10 cleanroom and is confined to the etching chamber for optimized uniformity. The machine also features two independent gas distribution systems for enhanced process versatility and control. The etching process is controlled using a user-friendly graphical interface that allows users to set etch conditions with ease and precision. The tool has a 7-inch etching chamber that is accessible from the side and features a rotating head that rotates up to 200°/s. This allows it to etch both sides of circuit boards and creates optimal uniformity across the entire circuit board. The rotating head is temperature-stabilized during etching to ensure accuracy and precision. The asset is capable of etching materials of various thicknesses, and can etch at speeds up to 30mm/min. PLASMATHERM 770 ICP also features an integrated mist filtration model, which captures etching process residue for improved cleanliness. The equipment also includes a self-cleaning function, which automatically cleans the nozzle and other components to maintain consistent performance during long runs. The system is designed for maximum safety and energy efficiency, and incorporates several safety devices to protect users and the environment. The unit also features a multi-language user interface, which makes it easy to use for users of different nationalities. 770 ICP is a versatile etching and ashing machine that combines precision, power, and speed for a variety of applications. This tool is the perfect solution for etching and ashing circuit boards, semiconductors, and other materials.
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