Used PLASMATHERM 790 Series #293763506 for sale

ID: 293763506
Wafer Size: 6"
Reactive Ion Etcher (RIE), 6" TPH 240 Turbo pump.
PLASMATHERM 790 Series is an advanced etching and ashing equipment designed to meet the most demanding requirements of production and research applications. It combines fast helium-jet activated reactive gases with high-frequency RF energy bores to provide a precise etching process. It has a low maintenance platform and a superior gas etching chamber that makes it a top choice for various high-precision applications in the electronics industry. 790 Series is a multi-application system that supports both reactive ion etching (RIE) and deep reactive ion etching (DRIE) applications. It includes a manual ascension and descension unit that provides easy and convenient sample loading, and an adjustable electric-field acting on the etching chamber for superior control of etch uniformity. The controller of PLASMATHERM 790 Series is based on a GSD software that ensures precise control of the process parameters. It has a large graphic display that makes it easy to operate the machine. The intuitive user-interface allows the user to easily adjust the parameters according to the needs of their application. The tool is designed for stellar temperature control and an improved atmosphere in order to achieve high etching quality and resolution. It uses a rapid gas replacement asset that purges the etching chamber with fresh, helium-rich gas. The 790 also offers a broad range of configurable high power RF power supplies, which can deliver up to ten kilowatt power. The advanced digital control model provides a precise control over etching parameters such as pressure, flow rate, and sample temperature, ensuring the highest levels of etching accuracy. The controller also ensures precise control over the electric field on the etching chamber, allowing the user to adjust the electric field according to their application 790 Series offers all the necessary features to meet the most demanding etching and ashing applications in the electronics industry. Its robust construction, advanced control equipment, and superior gas etching chamber make it a reliable and efficient choice for various high-precision applications.
There are no reviews yet