Used PLASMATHERM 790 #293729354 for sale
URL successfully copied!
Tap to zoom
ID: 293729354
Wafer Size: 2"-6"
Vintage: 1993
Reactive Ion Etcher (RIE), 2"-6"
Single chamber
Material used: Gas and Silicon
MFC: N2/SiH4/HE, HE, NH3
Pump
HX75 Chiller
RF
No loadlock
Throttle valve
Ion gauge controller: Manometer
Gas panel
Fluid input panel
Temperature control system
Operating system
1993 vintage.
There are no reviews yet