Used PLASMATHERM 790 #293775968 for sale

PLASMATHERM 790
Manufacturer
PLASMATHERM
Model
790
ID: 293775968
ICP Etcher.
PLASMATHERM 790 is a cutting-edge plasma etcher/asher equipment designed for advanced semiconductor and microelectronics device fabrication processes. This highly versatile system is manufactured by Plasma-Therm, a leading provider of plasma processing equipment for the global semiconductor industry. 790 employs innovative plasma etching and ashing technologies to accurately pattern and clean semiconductor materials with high precision and efficiency. With its robust design and state-of-the-art features, this unit is ideal for a wide range of applications including photoresist removal, dielectric etching, metal etching, and more. One of the key highlights of PLASMATHERM 790 is its advanced vacuum chamber design, which provides a controlled environment for plasma processing. The machine features a high-quality stainless steel chamber with excellent vacuum sealing capabilities to maintain the desired process conditions and enhance uniformity across the substrate surface. 790 incorporates multiple gas inlet ports that allow for precise control of process gases and flow rates. This enables users to tailor the plasma chemistry according to their specific requirements, facilitating optimized etching and ashing processes for different materials and device structures. Moreover, the tool is equipped with a sophisticated RF power supply and impedance matching network that deliver precise control over plasma generation and distribution. This ensures efficient ionization of process gases and uniform plasma distribution across the substrate, resulting in consistent and repeatable process results. PLASMATHERM 790 features a versatile electrode configuration that supports both single- and dual-frequency plasma generation. This flexibility allows users to choose the appropriate plasma source configuration based on their process requirements, whether it be high-density plasma etching or low-damage ashing. Furthermore, the asset is equipped with an advanced plasma source design that ensures stable and continuous plasma operation throughout the etching or ashing process. This feature is essential for achieving high process repeatability and yield in semiconductor manufacturing. 790 is also equipped with cutting-edge process monitoring and control capabilities to enable real-time process optimization. The model includes advanced endpoint detection technology that allows for accurate determination of process completion, ensuring precise removal of photoresist or other materials while avoiding overetching. Additionally, PLASMATHERM 790 offers a user-friendly interface and intuitive software control, making it easy for operators to set up processes and monitor equipment performance. The system also supports remote monitoring and diagnostics, enabling efficient maintenance and troubleshooting to minimize downtime and maximize productivity. Overall, 790 is a highly advanced plasma etcher/asher unit that offers exceptional performance, versatility, and reliability for semiconductor and microelectronics fabrication processes. With its state-of-the-art features and capabilities, this machine is a valuable tool for leading-edge research and production facilities in the semiconductor industry.
There are no reviews yet