Used PLASMATHERM 790 #293823821 for sale
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PLASMATHERM 790 is an etched chamber that is designed to deliver precision thermal control combined with ultra-high etch rate processes. It is a complete etching equipment that is capable of performing both plasma etching and ashing processes at high etch rates as well as providing precise thermal control. The core element of 790 is a state-of-the-art process chamber with a robust construction that is highly reliable and requires minimal maintenance. The chamber is designed to safely contain etching and ashing processes and provide an optimal process environment for these processes. The state-of-the-art design of the chamber ensures repeatable process performance, enabling superior etch rate performance and uniformity. PLASMATHERM 790 operates through the use of an integrated RF generator and isolator. This allows the system to operate at power levels up to 1.2 kilowatts and a maximum frequency of 13.56 MHz. These power levels offer sufficient power and performance for advanced etching and ashing processes. In addition, the unit also has the capability of controlling the process gas flow and pressure rate via integrated gas controls. This allows for the precise control of the etching and ashing process parameters and provides greater process repeatability and control. 790 is constructed with premium materials and hardware for maximum reliability and product quality. This ensures that the machine is built to exacting standards and delivers superior performance. Additionally, the tool also includes an integrated cooling chiller asset which ensures that all of the components remain cool throughout the entire process. PLASMATHERM 790 is an ideal choice for high-performance etching and ashing processes. It is designed for processes that require superior thermal control and ultra-high etch rates, providing precision control and reliable results. Furthermore, it is highly reliable and reduces the need for equipment maintenance, making it a cost-effective choice.
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