Used PLASMATHERM 790 #9156796 for sale
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ID: 9156796
Wafer Size: 8"
Vintage: 1999
PECVD Deposition system, 8"
Upper & lower electrode
Advanced Energy RFSS 5S
Lower electrode heated platen with controller
Plasmatherm PC Window based OS
208V, 60Hz, 60A
1999 vintage.
PLASMATHERM 790 is a versatile etcher / asher designed for a wide range of precision etching and ashing applications. Equipped with a 24-inch-long industrial-grade quartz chamber, 790 provides a reliable, active wiring and up to 400 watts of power for fast etching/ashing and high-quality results. In addition to the highly advanced control systems and advanced diagnostics, PLASMATHERM 790 comes with a number of safety features, including adjustable gas pressure settings, dynamic temperature sensors, and active thermal stability monitoring. 790 is equipped with a built-in plasma generator to enable the high speed etching/ashing. Additionally, PLASMATHERM 790 is outfitted with a nitrogen purge equipment to ensure uniform quantities of oxygen, nitrogen, and other gases are present during the etching/ashing process. The system features gas balancing and transitional modes to ensure uniform pressure throughout the process, as well as quick wafer shuffling between steps. 790 also features advanced temperature control technology and includes a built-in active protection unit (APS) to ensure optimal temperature conditions during etching/ashing. The APS automatically adjusts the temperature of the chamber and adjusts the power levels accordingly to maintain precise temperature conditions throughout the process. The etch rate of PLASMATHERM 790 is precise and consistent, making it ideal for a wide range of applications that require precise results. It provides a range of etch depths from a few microns up to a few hundred micrometers per minute. Additionally, 790's advanced diagnostics machine allows users to quickly identify and troubleshoot any problems with the etching/ashing process. In summary, PLASMATHERM 790 is a reliable, high-performance etcher/asher designed to enable precise, repeatable etching/ashing of a wide range of materials. It provides up to 400 watts of power and is outfitted with advanced control technology and real-time diagnostics to ensure accurate results. 790 also features adjustable gas pressure settings and temperature sensors, as well as active protection systems, to ensure reliable and uniform gas flow in the chamber.
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