Used PLASMATHERM AMNS-3000E #293604270 for sale

PLASMATHERM AMNS-3000E is a state-of-the-art etching/ashing equipment that is highly efficient and reliable. It is designed for precision etching/ashing of various substrates including copper, polyimide, silicon, glass, and metals. The system can be configured for manual or automated operation for applications such as flat panel displays, magnetic recording media, and semiconductor device fabrication. The etching/ashing unit is composed of three major components, namely the input platen, output platen, and etching/ashing chamber. The input platen is designed to accommodate substrates up to 20 x 20 inches. It utilizes a vertically moving platform to support the substrates, as well as a two-stage vacuum machine to ensure proper adhesion to the platen. The output platen is designed to hold up to 8 substrates. It features an integral conveyor belt tool which is driven by a variable frequency drive motor. The etching/ashing chamber is the heart of the asset, featuring a two-stage plasma injection model. This provides both an Ar/O2 plasma for etching/ashing, as well as a harmonic drive equipment for independent control of each process. The system is also equipped with a micro computer for process optimization and programmable interface for task management. The unit also features a number of safety features such as a pressurized chamber, interlock machine to protect personnel, and adjustable gas flow control for optimized process yields. In addition to the etching/ashing tool, AMNS-3000E also includes a powerful control software package. The package is designed to provide users with advanced process control and automated recipe management, enabling users to store and access critical process recipes with ease. The software also allows users to monitor all hardware parameters, as well as adjust, diagnose or fine-tune the process operation. PLASMATHERM AMNS-3000E is an ideal asset for a range of etching/ashing operations. Its advanced features and superior process reliability make it an exceptional value. Thanks to its user-friendly design, the model is also easy to use and able to provide consistent results time and time again.