Used PLASMATHERM Batchtop VII #293724144 for sale

Reactive Ion Etcher (RIE), 6" CI2 (10 SCCM) HBr (20 SCCM) O2 (20 SCCM) CF4 (44 SCCM) Min pressure: 10 mTorr Quartz (Recipe): 10 SCCM CF4, 300W, 30 mTorr Chromium: Cl2: 9.7 SCCM O2: 2.25 SCCM RF Power supply: 75W, 80 mTorr Etch rate: 75 nm/min.