Used PLASMATHERM Dual 790 #293815789 for sale

ID: 293815789
Vintage: 1998
PECVD/RIE System 1998 vintage.
PLASMATHERM Dual 790 is a cutting-edge etcher and asher equipment designed for precise and efficient plasma processing applications in the semiconductor industry. This advanced tool integrates dual-mode functionality, enabling both etching and ashing processes to be carried out in a single platform. The system offers unparalleled flexibility and control over the plasma parameters, making it a versatile solution for a wide range of device fabrication processes. At the core of Dual 790 is its high-density plasma source, which generates energetic species essential for etching and ashing of various materials. The unit utilizes advanced radio frequency (RF) plasma technology to create a highly uniform and stable plasma environment, ensuring consistent process results across the entire substrate surface. The RF plasma source produces a wide range of reactive species, allowing for selective etching and ashing of different materials with precision and accuracy. One of the key features of PLASMATHERM Dual 790 is its dual-mode operation, which enables seamless switching between etching and ashing processes without the need for machine reconfiguration. This capability not only streamlines the process flow but also maximizes tool utilization and productivity. The tool offers a wide selection of process gases and parameters, allowing users to tailor the plasma conditions to meet specific requirements for each processing step. Dual 790 is equipped with a sophisticated gas delivery asset that ensures precise control over the gas flow rates and mixtures. This model enables the creation of complex gas chemistries required for advanced plasma processes, such as deep reactive ion etching (DRIE) and surface modification. Additionally, the tool features advanced chamber design and pumping equipment for rapid gas evacuation and efficient plasma processing. The system incorporates a state-of-the-art temperature control unit to maintain substrate temperature within a tight range during processing. This feature is crucial for preventing thermal damage to sensitive materials and ensuring reproducible results in etching and ashing operations. The tool also offers comprehensive endpoint detection capabilities, allowing real-time monitoring of process progress and accurate determination of process completion. PLASMATHERM Dual 790 comes with a user-friendly interface and advanced software control, making it easy to program and execute complex plasma processes. The machine provides a range of diagnostic and monitoring tools for process optimization and troubleshooting, enhancing user experience and tool performance. Additionally, the tool is designed for high throughput and reliability, making it suitable for both R&D and production environments. In summary, Dual 790 is a versatile and advanced etcher/asher tool that offers dual-mode operation, precise plasma control, and advanced process capabilities for a wide range of semiconductor processing applications. With its cutting-edge technology and user-friendly design, this tool is well-suited for demanding fabrication processes in the semiconductor industry.
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