Used PLASMATHERM PECVD Heater #9124951 for sale

ID: 9124951
Resistance heater systems.
PLASMATHERM PECVD Heater is a type of etcher/asher designed for deposition of thin films of a variety of materials onto substrates. It is used in applications such as the manufacture of solar cells, thin film transistor processing, and other microelectronics processes. PECVD Heater is a high-density, direct frequency, RF heated, chemical plasmatron etcher that is designed to provide cost-effective, precise process control. It features a multi-station, parallel deposited process, allowing for accurate deposition of a range of materials for various materials. PLASMATHERM PECVD Heater is equipped with a deposition head which allows for a high level of flexibility when depositing materials onto the substrate. The deposition head is capable of handling a range of sizes and shapes of substrates, from flat panels to irregular shapes. PECVD Heater also features an integrated reactive gas delivery equipment, allowing for precise control of reaction rate and reaction media. This allows for reliable process control in complex chemistries, such as doping, selectivity, and 3D structures. PLASMATHERM PECVD Heater also features a number of process parameters that can be adjusted to optimize the deposition process. These parameters include reactor pressure, plasma voltage, RF power level, source temperature, source distance, source-to-substrate distance, and source power. PECVD Heater has also been designed with safety in mind, featuring a programmable electromagnetic interlock system, capable of CAE operation in the event of any unsafe conditions. PLASMATHERM PECVD Heater is a versatile and cost-effective etching/programmable deposition solution for a variety of thin-film manufacturing and microelectronics processes. It is capable of providing accurate and reliable process control thanks to a number of process parameters that can be adjusted, and an integrated reactive gas delivery unit. In addition, PECVD Heater is designed with safety in mind, featuring an integrated safety machine to ensure compliance with safety regulations.
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