Used PLASMATHERM PLASMA903e #9282870 for sale

PLASMATHERM PLASMA903e is a plasma etcher/asher engineered to fulfill advanced plasma etching and ashing requirements. With its cutting-edge engineering, PLASMA903e delivers precise, reliable etching and ashing results with a lifetime performance guarantee. PLASMATHERM PLASMA903e is equipped with a vacuum chamber, RF power and a high-flow delivery equipment for more precise etching and ashing. An advanced power, process and vacuum control system allows for total etching and ashing processes, assuring maximum production efficiency. Process automation and ECN data feedback unit are implemented for user convenience and process repeatability. The etcher/asher is a very precise and reliable machine. It is ideal for in-depth etching and ashing with an etching precision of ±2% to get precise patterns. The etcher/asher is enclosed in a highly-durable sealed chamber designed with state-of-the-art stainless steel and PEEK materials to withstand extreme temperatures, chemical corrosion and physical shock, preserving the workpiece in spite of harsh conditions. The machine is equipped with a computer operated multi-process controller for user convenience and process repeatability. An automatic process cooling machine is implemented for rapid and uniform cooling of the process chamber and the substrate, resulting in consistent etching and ashing quality. This tool also enables rapid cooling time and increased production efficiency. PLASMA903e also has an operational range of wafers from 1" to 12" in diameter. It has a maximum vacuum rate of 1000mTorr, with a uniformity within ±20% and can be operated at temperatures up to 450°C. The machine is capable of delivering high-quality materials to the substrate with an etching rate of up to 0.15 microns/second. This high-performance etcher/asher provides an incredibly precise process without having to sacrifice performance. All of these features come together to make PLASMATHERM PLASMA903e the perfect solution for high-tech etching and ashing needs.