Used PLASMATHERM SLR 720 / 720 #293654493 for sale
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ID: 293654493
Vintage: 1998
Dual chamber Reactive Ion Etch (RIE)
Robot loader
(9) MFC
Turbo pump
RF5S RF Generator, 500 W, 13.56 MHz
Does not include roughing pump
PC Controller with graphical user interface
Power supply: 208 V, 60 Hz, 3 Phase
1998 vintage.
PLASMATHERM SLR 720 / 720 is a powerful, high-end etcher/asher designed for the most demanding industrial requirements. This superior etcher/asher offers many top-notch features and functions which are sure to meet all the needs of the modern factory. SLR 720 / 720 is highly versatile and can handle a wide range of substrate materials including Si, Al, Cu, Ni, and Ta. The machine is equipped with a high-grade multi-ambient temperature control system that allows it to work in a range of temperatures from 200 °C to 500 °C. This ensures that optimal temperatures are maintained for each particular material and process. PLASMATHERM SLR 720 / 720 is designed to produce superior results with maximum precision, speed and repeatability. It offers a laser service window from 0.2µm to 7.0µm, or as small as 0.1µm for certain materials, and features a fine accuracy of 0.05µm. Furthermore, the program allows for up to 500 different recipes to be stored and recalled with ease. The machine also has a Process Navigator that can save time in batch runs, by automatically setting the etching depth according to the recipe. SLR 720 / 720 is tightly sealed and uses an advanced stainless steel vacuum chamber to ensure a clean etching process with minimal contamination and exposure to fumes. It includes a dynamic profiling system with an etched depth sensor which automatically adjusts the laser power according to the recipe to ensure accurate results. It also has a range of safety features including auto-shutdown and low temperature alert. These ensure the highest level of safety while working with hazardous substances and materials. PLASMATHERM SLR 720 / 720 is an extraordinary etcher/asher that is designed to deliver superior results with maximum precision, speed and repeatability. It has the capability to handle a wide range of substrate materials, with fine accuracy and repeatability, and provides protection from hazardous materials. With its advanced features and high-end performance, SLR 720 / 720 is a perfect choice for modern industrial applications.
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