Used PLASMATHERM SLR 720 #9123968 for sale

Manufacturer
PLASMATHERM
Model
SLR 720
ID: 9123968
Wafer Size: 4"
Vintage: 1999
Reactive Ion Etcher (RIE), 4" Plasma shuttle-lock load-lock loading system Platen transfer 700 Al Chamber PC Window based system, 11" ADVANCED ENERGY RFPP RF Generator 500 W Matching network (2) Mechanical pumps NESLAB HX 75 Chiller LEYBOLD 361C Turon LEYBOLD NT 150/360 Controler Gas distribution center (4) Mass flow controllers: BCl3-100, Cl2-50, O2-100, N2-50 Manuals included Power supply: 208 V, 3-Phase 1999 vintage.
PLASMATHERM SLR 720 is a plasma etcher / asher designed for precision etching and ashing of advanced materials. SLR 720 is capable of etching and ashing with high speed, accuracy and uniformity, making it an ideal choice for a wide variety of etching and ashing applications within the semiconductor industry. PLASMATHERM SLR 720 is a high-throughput device with a standard etching rate of up to 800 nm/min. It also has an efficient plasma source that utilizes dual chamber engines and a four-channel RF generator. This allows for a high-performance etching process with low ion energy and excellent uniformity across wafers. In addition, SLR 720 has an advanced control system that enables users to input and control user-defined parameters. These parameters include etch and ashing parameters, RF generator settings, and chamber pressure. PLASMATHERM SLR 720 includes an easy-to-use, intuitive, and user friendly graphical user interface (GUI) that allows for complete control of the etching and ashing process. It also includes a 3D visualization tool, allowing the user to view the etch and ash process in real-time, providing added stability and uniformity across wafers. SLR 720 uses a dry, low-pressure (DLPO) process for the etching and ashern. This process utilizes a high gas flow rate to entrain ions and reactive gases, which allows for higher etching and ashing throughputs and faster processing times. PLASMATHERM SLR 720 also has a variety of advanced safety features such as gas and pressure safety monitoring, automatic gas shut off, and a manifold control unit. This makes it suitable for use in a variety of safety-critical applications. Overall, SLR 720 is an ideal choice for a large variety of etching and ashing applications across the semiconductor industry. With its high-performance, high-speed, and accurate operation, it is a reliable choice for industries seeking consistent results and reliable performance for their etching and ashing applications.
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