Used PLASMATHERM SLR 720 #9153526 for sale

Manufacturer
PLASMATHERM
Model
SLR 720
ID: 9153526
Wafer Size: 6"
Vintage: 1996
Reactive Ion Etcher (RIE), 6" Aluminum chamber with load lock Bottom electrode, 11" MKS 286 Controller (6) Zones heated chamber MKS 290 Ion gauge controller LEYBOLD 360 Turbo with 150/360 controller ADVANCE ENERGY RFPP 5S RF Power supply With AM5 matching network Gas configuration: (4) MKS 1159 MFCs (50,100,100,200 Sccm) Operating system: Windows OS Power supply: 208 V, 3 Phase, 60 Hz 1996 vintage.
PLASMATHERM SLR 720 is an advanced etching / asher equipment designed for applications that require precise etching and high-yield operation. SLR 720 offers a variety of etching processes, including reactive ion etching (RIE), ion plating (IP), and hard etching (HE). PLASMATHERM SLR 720 is ideal for processing high-value substrates, providing optically clean surfaces. Powered by the high plasma power, SLR 720 offers superior etch performance and a wide range of etching conditions, enabling users to achieve optimal etch depth, precision, and pattern definition. The etching and ashing processes are independently controlled, providing the perfect conditions for high-yield production. The innards of the machine include an advanced motion control system that increases accurate positional accuracy and repeatability. PLASMATHERM SLR 720 is designed to be user-friendly and simple to use, ensuring that any academic and/or industrial user can adapt to the machine quickly and efficiently. It features an intuitive graphical user interface (GUI) to make operation as straightforward as possible. The advanced electro-magnetron sputtering (EMS) feature of SLR 720 enables it to produce optically clean surfaces with superior uniformity and thickness control. This makes it a great choice for a wide range of applications such as the deposition of conductive films, passivation, and etching of patterned substrates. In addition, PLASMATHERM SLR 720 features a number of safety features to help prevent accidents. An extremely strict exhaust unit is in place to ensure the release of any by-products of the etching process is regulated and kept at safe levels. In terms of maintenance and servicing, SLR 720 is designed for easy-to-follow and quick maintenance procedures. The intuitive preventative maintenance scheduling machine alerts users when maintenance is due, ensuring that optimal operation is achieved at all times. In conclusion, PLASMATHERM SLR 720 is an advanced etching / asher tool that offers a great balance between accuracy, performance, and safety. It is highly suitable for high-value substrate processing and offers a variety of etching processes. The intuitiveGUI and preventative maintenance asset make it easy for any user to benefit from its sophisticated features.
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