Used PLASMATHERM SLR 720 #9153536 for sale

Manufacturer
PLASMATHERM
Model
SLR 720
ID: 9153536
Wafer Size: 2"-8"
Vintage: 1997
Reactive Ion Etcher (RIE), 2"-8" Aluminum chamber with load lock Bottom electrode, 11" LEYBOLD 361C Turbo with 150/360 controller ADVANCED ENERGY RFPP 5S RF Power supply With AM5 matching network Gas configuration: (4) MFCs-SF6, CF4, N2, O2 With (2) N2 purges LEYBOLD D16 Roughing pump LEYBOLD D65 Backing pump NESLAB HX75 Chiller Power supply: 208 V, 3 Phase, 60 Hz 1997 vintage.
PLASMATHERM SLR 720 is an etcher and asher designed to perform advanced etching and ashing processes efficiently. It can etch both planar and microgrove surfaces accurately and quickly, allowing for a wide range of applications in the fabrication of microfabricated components and devices. The equipment includes an ultra-compact RWE (Rapid Wafer Etching) chamber, designed for large-scale, efficient wafer processing. Its patented, high-pressure, atmospheric-pressure etcher is a powerful solution for precise etching of substrate materials. SLR 720 features multiple electrode assemblies for optimal etching control. It operates by using a pulse-modulated radio-frequency (RF) excitation with pulse-modulated power supply, to provide uniform and variable power levels. This, combined with its advanced electrostatic control system, ensures precise control over substrate material etching and enables repeatable results. Its auto-programming software enables fast, easy programming of etching and ashing process recipes. PLASMATHERM SLR 720 also comes with an advanced process monitoring unit, which allows operators to monitor results in real-time. Its diagnostic sensors provide detailed information on the etching and ashing process, enabling proactive control and prevention of process variations. Additionally, its automated exhaust machine provides efficient control of gases and contaminants during etching and ashing. SLR 720 is designed for high-precision etching of metal and silicon wafers. It can also be used to etch thin-film materials such as carbon-fiber-reinforced plastics and ceramic substrates. Ideal for microfabrication processes, the tool is designed to be reliable, easy to use, and cost effective. In conclusion, PLASMATHERM SLR 720 is a reliable etcher and asher designed to provide precise, repeatable results in advanced etching and ashing processes. Its automated systems, comprehensive diagnostics, and efficient exhaust systems provide operators with an easy, cost-effective way to achieve accurate, repeatable results.
There are no reviews yet