Used PLASMATHERM SLR 720 #9153540 for sale

PLASMATHERM SLR 720 is an advanced etcher / asher designed for use in precision-sensitive microelectronic applications. The technology, developed by PLASMATHERM, combines physical, chemical, and mechanical treatments to help ensure surface quality, planarity, and lasting cleanliness. SLR 720 is a single-chamber equipment that features two independent plasma sources. The first source utilizes a flexible rotating magnetron for proper material removal. The second source uses a variable frequency generator (VFG) for low-pressure multi-frequency operation. A precision-adjustable RF power supply coupled with the VFG, allows for precise control of the plasma environment, allowing for user-defined etch recipes. The etch process is enabled by a direct current (DC) source, which is coupled with a power supply biased with a low-frequency signal, allowing rapid application of the desired surface treatment. The two independent plasma sources help maintain uniform ion bombardment over the sample surface and create a consistent process window. PLASMATHERM SLR 720 also contains a fully automated in-situ cleaning system. This unit pre-treats the chamber and the process chamber, as well as all controllable components, before each etching cycle. The in-situ machine not only helps keep the chamber clean and free from contamination, but it also ensures that the plasma sources operate within their optimum range. SLR 720 can be integrated with automated load-lock systems, and features a software package that allows users to program recipes to meet their specific needs. In addition, the tool is also equipped with a touch panel for easy monitoring and control of all process parameters. Overall, PLASMATHERM SLR 720 is an advanced etcher / asher designed to meet the needs of the precision microelectronics industry. Its in-situ cleaning asset, dual-source technology, and precision-tunable power supplies ensure high-quality and repeatable etch processes with superior surface finishes.