Used PLASMATHERM SLR 720 #9156982 for sale
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ID: 9156982
Wafer Size: 8"
Reactive ion etcher (RIE), 8"
Manual load lock
Advanced energy RFPP 5S RF Power supply
Match work and tuner
Leybold 361C turbo with NT20 controller
4 MFCs
11" Lower electrode
13" Shower head.
PLASMATHERM SLR 720 is a sophisticated piece of etch / asher technology from PLASMATHERM. It offers a range of features and capabilities essential for the successful etching and ashing of CDs, ICs, substrates, and many other materials. It is a fully contained etching and ashing equipment, complete with its own built-in PC Workstation, an integrated 16-gas arsenal coupled with a high-accuracy pumping system, and an ergonomic robotic arm. The integrated PC Workstation offers an intuitive, user-friendly interface supporting both remote operation and monitoring of the unit online. The integrated 16-gas arsenal encompasses 7 different gases, ranging from oxygen to silane, to provide optimal etching and ashing of a wide range of materials. The high-accuracy pumping machine precisely controls gas flow, ensuring accuracy and repeatability in the etching and ashing processes. The robotic arm further helps with accurate and efficient etching of substrates in hard-to-reach areas. SLR 720's enhanced hardware-software configuration enables versatile etching capabilities. The tool can be programmed to etch multiple substrates in both single and multiple processes such as real-time parameter optimization, real-time scan control, depth control and profile corrections, or the combination of these processes. Additionally, PLASMATHERM SLR 720 allows for integrative etching of second-level metallization, thereby helping reduce the required process time. PLASMATHERM pricing model is scale-friendly, making it ideal for both small-scale and large-scale etching industries. The asset also offers enhanced mechanical and safety features. Its built-in safety monitoring model helps to protect the equipment, and people, from burn-out and overflow. Additionally, the system features emergency shut-off buttons, allowing for immediate shutdown and preventing potential damage. In short, SLR 720 is a robust, versatile etching and ashing unit with an ergonomic design, high-accuracy pumping machine, intuitive PC workstation, 16-gas arsenal, expansive etching capabilities, and integrated safety features. It provides a cost-effective and highly efficient etching and ashing solution for CD, IC, and other substrate applications.
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