Used PLASMATHERM SLR 720 #9293239 for sale
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ID: 9293239
Vintage: 1992
Reactive Ion Etcher (RIE)
Plasma shuttle-lock load-lock loading system
Platen transfer 700 Al Chamber
PC Window based system, 11"
RF Generator
Z80 Controller
MKS 286 Controller
MKS Gauge controller 290
MKS 252 Exhaust controller
Stroke pump
LEYBOLD 361C
Gas distribution center
(2) Mass Flow Controllers: N2, O2
1992 vintage.
PLASMATHERM SLR 720 etcher/asher is a revolutionary tool for surface processing of specific materials like glass, semiconductor-grade quartz and plastics. It is a powerful, cost-effective system that is easy to use and maintenance free. SLR 720 is a Plasma Thermal Etcher and Asher that uses just a single part instead of multiple parts. It is an innovative machine that is designed to increase processing speed and accuracy while reducing cost. PLASMATHERM SLR 720 is equipped with two plasma jets that are capable of etching, passivating or beveling with extreme precision. It can also be used for post processing and advanced cleansing. The machines dual-stage pre-heating is designed for fast, effective and thorough end product heating. It is engineered to rapidly uniform the temperature of the part, increasing its production speed and accuracy. SLR 720 comes with a versenabile design and is highly configurable. Its easy to use interface allows the user to customize processes on a per-part basis, increasing production efficiency. The machine comes with three main configurations: a wet etch, dry etch, and self-contamination prevention configurations. The wet etch configuration provides the highest degree of precision, while the self-contamination prevention system reduces contamination risk. PLASMATHERM SLR 720 is capable of delivering high part throughput and extremely low thermal budget. The machine is ideal for semiconductor, glass and plastic parts that require a precisely etched, ashed or beveled surface. Its advanced design and robust motor provide a reliable, reliable performance with minimal downtime. It is also designed with a reduced noise emissions to provide a comfortable working environment. Additionally, the machine is built with top grade materials for utmost durability and longevity. In conclusion, SLR 720 is a revolutionary tool for precision etching, ashing and beveling. It is highly configurable and provides exceptional part throughput with minimal thermal budget. PLASMATHERM SLR 720 is easy to use, maintenance-free and will deliver the optimal results every time.
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