Used PLASMATHERM SLR 730 #9123961 for sale

Manufacturer
PLASMATHERM
Model
SLR 730
ID: 9123961
Vintage: 1997
PECVD System, 2"- 8" Shuttle lock load lock loading system Platen transfer Model 700 Al chamber Top electrode: 13" Heater: Watlow 250ºC RF Power supply: RFSS with AM5 matching network (8) MFC's: MKS 1179: N20, N2, NH3, N2, SF6, Silane 2% in He, Silane 1.9% in He Chiller: Neslab HX 75 OS: Plasmatherm windows 208V, 3 phase, 60A 1997 vintage.
PLASMATHERM SLR 730 is a state-of-the-art etcher and asher used for precision surface micro-machining. It offers excellent uniformity and repeatability of results due to its high-speed multiple-beam excimer laser technology. With a flexible, compact and modular design, it is highly convenient for a variety of production processes. PLASMATHERM SLR-730 has an operating temperature range from -20 °C to +55 °C, a frequency range from 0 to 20 MHz and a power range from 0 to 1.5kW. Its single-rod scanner equipment ensures that workpieces are coated with uniform, accurate and precise results. In addition, it has a built-in self-protection feature that disables the system if a malfunction occurs. SLR 730 has several unique features and benefits, allowing it to produce superior results compared with other etchers and ashers. It has a direct-inject laser chamber, which makes it easier to etch, cleave and ablate materials, and a rotating workspace that provides increased precision when processing various materials. Furthermore, its load-lock unit offers increased safety and convenience during operation, as it keeps the chamber clean and allows for uninterrupted, continuous operation during chip production. SLR-730 achieves an exceptionally low residual loss of 0.3% and supports very low-temperature processing, providing users with high yield and performance in terms of volume and quality of results. Additionally, its large capacity makes traditional batch processing obsolete, as up to 500 individual substrates can be simultaneously processed in one uniform run. To maximize user convenience, PLASMATHERM SLR 730 has a user-friendly HMI (human-machine interface) that allows for easy operation. It has an intuitive user guidance machine and can be used by operators with no prior experience. Furthermore, its easy maintenance cycle allows for prolonged lasting performance, while its low operational costs enhance its value. PLASMATHERM SLR-730 truly is a state-of-the-art etcher and asher, with its wide range of features, benefits and advantages offering superior performance and precision in various processes. Its consistent results and user-friendly structure make it an ideal choice for both established and new businesses seeking reliable, cutting-edge micro-machining solutions.
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