Used PLASMATHERM SLR 730 #9363419 for sale

Name: PLASMATHERM SLR 730
Brand: PLASMATHERM
SKU: 9363419
Availability: InStock

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Etchers / Ashers

Manufacturer

PLASMATHERM

Model

SLR 730

ID: 9363419

Vintage: 1994

PECVD System 720 RIE (Reactive Ion Etcher) 700 Aluminum body chamber Stand alone dual chamber 730/720 deposition and etch system Substrate holders configured for 4"-8" Load lock version with (2) process modules: PECVD RIE (Reactive Ion Etcher) Main body: Stainless steel skins Windows based PC controls ADVANCED ENERGY RFPP RF5S Power supply, 500 W-13.56 MHz ADVANCED ENERGY AM5 Matching network with tuner LEYBOLD D25 / Equivalent load lock pump NESLAB HX 75 Chiller with RS232 interface to system Electrical disconnect box: 208 V, 3 Phase, 60 Amp Flat panel display with keyboard and mouse Manuals PECVD Module: Heated chuck WATLOW Controller Chuck with center lift type, 11" Optical windows for endpoint control and diagnostics LEYBOLD D40 With 151 blower mechanical pump MKS 290 Ion gauge controller and ion gauge MKS TC Gauge controller (1 or 2) Torr baratron (4) Gas MFC's (Can add up to 4 more) RIE Module: Lower electrode Shower head, 11" Center lift type chuck, 11" Optical windows for endpoint control and diagnostics Soffie class III laser endpoint detector MKS 153 Throttle valve LEYBOLD 361C Turbo pump LEYBOLD 150 / 360 NT Turbo controller LEYBOLD D40BCS Mechanical roughing pump 500mT Baratron Gas manifolds and gas line: (4) Gas sticks / Lines Nupro valves with bypass valves Unions Glands VCR Fittings MFCs and Gas manifolds PLASMATHERM Dual chamber PECVD / RIE system: (2) 4-Port manifolds (2) Gas sticks for Nitrogen and Argon to include nupro valve MFC and L leg to gas connection (2) Gas sticks with bypass: (3) Nupro valves and MFC's (2) 4 Channels valve control PCB 1/8" Tubing for the nupro valves, ~40 ft Flow rates: PECVD: Nitrogen: 2000 SCCM Argon: 500 SCCM RIE: BCL3: 50 SCCM Cl2: 50 SCCM 1994 vintage.

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PLASMATHERM SLR 730 is a professional-grade etcher/asher designed for the precise, repeatable and uniform finishing of delicate substrates. It is an advanced plasma etching equipment, utilizing a vacuum chamber for controlling the atmosphere during plasma processing. The system uses a direct current plasma source, with uniform electrodes, to create reactive species of ions and excited neutral particles. This produces incredibly high ion density, resulting in fine structure up to 10nm in size with an accuracy variation of less than 1%. In addition to its extraordinary etching consistency, PLASMATHERM SLR-730 ensures precise control of the material etching rate. With its advanced programming User Interface (UI), users can select from a variety of gas types and delivery mechanisms to dial in the rate of etching on the substrate. The UI allows users to select from 6 different plasma parameters, including pressure, gas flow, gas concentration, and total pulse time. SLR 730 also features a number of safety features, such as interlock systems, thermally insulated chambers, and an optional remote start and shutdown feature. These ensure that users can operate the unit without any risks to themselves or the environment. In terms of practicality, the machine comes with an ergonomic design, featuring a single-touch operation of the tool. This ensures that users can quickly and conveniently adjust all settings and make progress in the task at hand. This is complemented by the asset's removable powder-based vacuum chamber, which saves time and effort when changing substrates and performing cleaning cycles. SLR-730's maintenance requirements are minimal, with only periodic cleaning cycles required. This is due to the model's long life magnetic coils, which are more efficient and require little maintenance. Overall, PLASMATHERM SLR 730 is a high performance etcher/asher that offers a great combination of features. It provides precise, repeatable and uniform etching results with precision accuracy variation up to 10nm. In addition, the equipment's user-friendly UI enables quick and intuitive setting selection, which is complemented by the system's safety features and efficient maintenance requirements. All of these features make PLASMATHERM SLR-730 a great choice for any professional looking for a reliable and precise etcher/asher.