Used PLASMATHERM SLR 730 #9412635 for sale

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PLASMATHERM SLR 730
Sold
Manufacturer
PLASMATHERM
Model
SLR 730
ID: 9412635
Wafer Size: 6"
PECVD System, 6".
PLASMATHERM SLR 730 is a state-of-the-art, single-sided etching and ashing equipment that is used for the quick and efficient removal of photoresist and other materials from multiple substrates, including silicon, quartz, and many metals. PLASMATHERM SLR-730 comes equipped with advanced features that allow users to quickly and accurately remove layers of sensitive materials from substrates. SLR 730's core feature is its advanced plasma chamber, which is specifically designed and optimized to maximize the reliability, safety, and throughput of etch and ashing processes. The chamber utilizes a unique two-stage process - first generating high plasma temperatures for etching, and then reducing the temperature for ash removal - to minimize the possibility of damaging the substrate during the process. The plasma chamber is composed of a robust stainless steel shell and is lined with an ultra-high-purity ceramic liner to ensure durability. In addition, SLR-730 features a fully-integrated process control system that allows users to set precise process parameters and monitor performance. This unit gives users complete control over the etching and ashing process and helps ensure that every substrate is etched and ashed with reliable accuracy. The control machine features a color touchscreen LCD control panel that allows users to adjust the etch/ash pressure, temperature, and other parameters with just a few touches. Finally, PLASMATHERM SLR 730 is equipped with safety features that guarantee the safety of users and substrates. All operations are monitored for safety, with a robust tool of fault detection and protection ensuring that the plasma chamber does not overheat or overpressure. Additionally, PLASMATHERM SLR-730 is protected by a unique stainless steel chamber door guard, which ensures that the plasma chamber is completely protected in the event of a chamber blow-out. SLR 730 etching and ashing asset is the perfect choice for users who require precise, repeatable results when they're etching and ashing materials. With its robust plasma chamber, advanced process control model, and safety features, SLR-730 is the perfect solution for those who require reliable etch and ashing performance.
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