Used PLASMATHERM SLR 740 / 720 #293605243 for sale

ID: 293605243
Vintage: 1999
Reactive Ion Etcher (RIE) 1999 vintage.
PLASMATHERM SLR 740 / 720 is an etcher/asher designed for high-precision electro-etching and ashing of nanoscale materials. This advanced process technique enables optimized control of etching and ashing parameters for selective material removal. The machine's integrated sensing equipment ensures precise and repeatable operation, providing an ideal solution for a variety of fabrication and research needs. SLR 740 / 720 offers user-friendly control over etching and ashing parameters via a simple graphical user interface. The user can easily adjust the etch and ashing process parameters to meet the desired results in terms of sample profile, uniformity, lateral etching and anisotropy. The system is also capable of performing multiple etching and ashing processes in a single run, making it an ideal choice for research purposes. The integrated sensing unit allows for precise control of the etching and ashing process as well as accurate monitoring of the etch rates. The etching rate is determined and measured in real-time during the etching process, and the user can adjust the etching process in real-time accordingly. The etching process is also protected from small changes in the environment by an air-flow guard that prevents clogs, dust and other contaminants from entering the process chamber. PLASMATHERM SLR 740 / 720 features a high power, medium frequency capacitively-coupled source, which is capable of achieving superior selectivity in the etch and ashing of nanoscale materials. This ensures that the desired profile, uniformity and anisotropy are achieved in the sample. The machine is self-contained and includes features such as a built-in vacuum chamber, built-in motorized wafer rotation and a dedicated support machine. The machine also includes advanced safety features such as an interlocking tool, gas safety shutoff, emergency power off and key lock to prevent unauthorized access. All major components of the machine have been designed with highest quality and reliability standards, ensuring durability and superior performance. The machine is backed by a comprehensive customer service and support network, making it an ideal choice for laboratories and research facilities.
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