Used PLASMATHERM SLR 770 ECR #293605777 for sale

PLASMATHERM SLR 770 ECR
ID: 293605777
Etcher Substrate size: 100 mm Microwave generator: 1 KW, 2.45 GHz RF Generator plates: 500 W, 13.56 MHz Substrate mounting: Mechanical Temperature range: 0°C to 50°C Gases: CHF, SF, CF, O, N, H, Ar.
PLASMATHERM SLR 770 ECR is a state-of-the-art etcher/aser manufactured by PLASMATECH, a leading industry provider of process tools and systems solutions. This advanced equipment uses ionized gas (plasma) to etch, clean and care for a range of materials. This includes glass, ceramics, plastics, metals and semiconductor materials. The PLASMAHERM SLR 770 ECR is feature filled with many technology advances. The etching/ashing process is combined in one compact unit, allowing for a fast and efficient wafer processing. It also has a load lock for quick access to the etch chamber and a built-in vacuum system for higher throughput. Additionally, the SLR 770 is designed for remote control operation for easy access for the operator. The etcher/aser has integrated diagnostic functions that use RF and temperature analysis, as well as advanced temperature mapping to optimize the process. In addition, the device has an advanced recipe system to maximize etch quality and uniformity and also boasts user-friendly controls and easy navigation. The PLASMAHERM PLASMATHERM SLR 770 ECR's flexibility also allows for a range of specific etch recipes depending on the material. This can be conveniently achieved using the manual gas delivery and its adjustable process parameters, such as current and voltage, voltage blend, pre-tune cycle and plasma source. The etcher/aser also boasts a very high-resolution LCD monitor and an intuitive graphical user interface that provides visual feedback, which simplifies operations. The device also features an integrated heater, gas-flow control and automated calibration, as well as remote diagnostic and control capabilities, for improved reliability and process security. The device also comes with integrated safety features such as ESD protection and Vacuum Overpressure limiting. The PLASMAHERM SLR 770 ECR also has a modular design, making it easy to integrate and use with existing etch systems. It also has a very competitive cost, making it a great choice for organizations looking to elevate their etch processes.
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