Used PLASMATHERM SLR 770 ICP #293763388 for sale

PLASMATHERM SLR 770 ICP
ID: 293763388
Vintage: 2001
ICP Etcher 2001 vintage.
PLASMATHERM SLR 770 is a highly advanced etcher/asher designed for precision etching and ashing at the highest efficiency rate for today's advanced production tools. It offers unsurpassed performance with top-level accuracy and process control that can make difficult microfeature processes much easier to complete. The equipment is designed to accommodate extreme intricate details and can produce extremely fine line dimensions that are only achievable with the most advanced etcher/asher technologies. The 770 features a 'capable' RF generator that can deliver maximum power of up to 20 kW. This generator is equipped with advanced phase control technology, which allows the RF generator to deliver precise power control for precise etching or ashing of parts or materials. With the advanced generator, SLR 770 can achieve micron-level accuracy that is otherwise impossible with more traditional etcher-ashers. PLASMATHERM SLR 770 also features a highly efficient, multi-gas delivery system that allows for direct control of specific gas mixtures for optimal performance. Depending on the application, users can easily mix various gases from the gas architecture to achieve the desired etching or ashing effect. The effective rate of liberation for individual gases is additionally adjustable across multiple parameters such as temperature, pressure, and type of gas. SLR 770 also boasts a high resolution imaging unit to enable precise etching/ashing without compromising accuracy or quality. The machine utilizes a CMOS camera with up to 2560x2560 resolution images to detect all micro features with a very high accuracy. This provides a high level of precision for etching or ashing limited to tighter geometries or complexes features. PLASMATHERM SLR 770 is also designed with a robust control panel that allows for quick access and modifications to the tool's process parameters. The control panel also allows users to monitor and adjust the asset's performance at any time, thus lowering the risk of a faulty etching or ashing. Overall, SLR 770 is a high-performance, versatile etch asher designed to produce intricate features with unparalleled precision. Its multi-gas delivery model, capable RF generator and advanced imaging equipment offers users the ability to produce microscale features at incredible speeds, to exacting standards.
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