Used PLASMATHERM SLR 770 #293663077 for sale

PLASMATHERM SLR 770
Manufacturer
PLASMATHERM
Model
SLR 770
ID: 293663077
ICP Etcher.
PLASMATHERM SLR 770 is a high-performance dry etcher and asher offering exceptional control, accuracy, and reliability. This state-of-the-art equipment is designed with numerous proprietary features, built to achieve the highest etch rates in the industry. It is ideal for use in the production of semiconductors, MEMS components, thin-film layers, and many other microfabrication processes. The machine is composed of an enclosed processing chamber, vacuum pumps, control systems, and a load-lock system. It uses both plasma operating gases and reactive gasses for etching and ashing processes and is highly adjustable, with the ability to cycle up to three different gas mixtures. The onboard software offers the level of precision necessary for accurate etching and provides a superior operator interface. SLR 770 is outfitted with several features that make it an ideal etcher and asher for production. It is constructed with a double-ended eye, which allows for multiple view angles in order to monitor the process. Additionally, the unit is fully automated to ensure consistent operation and maximum efficiency. This is further complemented by an optical window that enables the operator to view the process without opening the chamber. The machine also features an advanced optical machine, with which uniformity and control of the etch processes can be maintained. This includes a set of lasers that can be used to precisely focus the etch plasma and monitor the process. It also offers precise pressure regulation to further optimize etch results. PLASMATHERM SLR 770 also comes with a variety of safety features, such as automatic interlocks that prevent opening of the chamber. This tool has been certified by CE and is RoHS- and WEEE-compliant. PLASMATHERM commitment to safety further extends to a CO2 fire suppression asset in the event of an unexpected fire or explosion. To ensure that the highest levels of performance and quality are achieved,SLR 770 is regularly tested by an independent lab to make sure it is operating within compliance. With its advanced, industrial-grade design, PLASMATHERM SLR 770 dry etcher and asher is the perfect tool to ensure optimal part etching and ashing in the production process.
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