Used PLASMATHERM SLR/ECR #9123962 for sale

PLASMATHERM SLR/ECR is an etcher/asher designed for precision and repeatability in semiconductor manufacturing processes. It is produced by PLASMATHERM, a leading provider of equipment and solutions for various plasma processes. The SLR/ECR is used for various etching and ashing processes, and has an optimal etching and ashing performance with low contamination, thanks to its combination of both single-wafer and batch processing. PLASMATHERM SLR/ECR is ideally suited for a variety of wafer sizes of various shapes and materials, and offers a wide range of operating temperatures; up to 1300°C. The etcher/asher is equipped with a precision motion equipment and a remote vision system, allowing users to monitor the process in real-time and make adjustments if necessary. The remote vision unit also provides a remote control interface, allowing users to monitor and control the etching and ashing processes from a remote location. The SLR/ECR features an advanced gas delivery machine which provides accurate and stable flows and flow mixing, enabling precise and repeatable etching and ashing results. The tool also offers a series of embedded temperature sensors to ensure consistent operating conditions. The temperature sensors also provide fast feedback to the user regarding the thermal conditions inside the processing chamber and prevent over-heating or cooling of the process. In addition, PLASMATHERM SLR/ECR comes with a variety of safety features to protect both users and components during processing. It is equipped with a safety interlock mechanism to prevent accidental exposure to hazardous materials, while the remote vision asset is monitored for any sharp movements or abrupt changes in pressure. A UV-absorbing window with a protective cover shields users from potential ultraviolet radiation. PLASMATHERM SLR/ECR is designed to meet the highest standards of precision and repeatability in semiconductor manufacturing processes, and is ideal for etching and ashing processes on various materials and wafer sizes. Its advanced gas delivery model, remote vision equipment, temperature sensors, and safety features make it an excellent choice for both industrial and research applications.