Used PLASMATHERM / UNAXIS 700 #9096334 for sale
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ID: 9096334
Reactive Ion Etcher (RIE)
Pressure controller: PRM-1
RF generator supply: HFS 500
Mass flow control: MFC-5
Available options:
LH D60 WS/WA 251
Blower 179 CFM blower package
Vacuum hose and fittings.
PLASMATHERM / UNAXIS 700 is an advanced etcher/asher equipment, capable of very precise and advanced etching and ashing operation. It works by exposing metals, polymers and organic materials to a plasma of oxygen, argon, nitrogen and chlorinated hydrocarbons, creating reactive species on the surfaces which rapidly etch and ash the material. The system employs high precision multi-axis control for precise etching and ashing using a variety of process tools including single-axis, interactive, and multi-axis motion systems. The device comes equipped with a Programmable Logic Controller (PLC) and user interface control panel, allowing for the programming and customizing of etching and ashing parameters and using the device in complex industrial production process. The PLC is easily accessibly for users and allows for customized programming, diagnosis, and viewing of process data. The user interface comes preloaded with manual and semi-automatic settings, and also includes an auto-sequence feature allowing for the easy setting of multiple parameters. The unit is built on an open architecture hardware and software platform, providing process flexibility and capabilities to meet the needs of any customer. The open architecture allows for integration of the latest technologies, including high-speed process control, automated diagnostics and manufacturing intelligence capabilities. The architecture also includes a powerful and scalable component-based software suite to support the etcher/asher operations. UNAXIS 700 comes with an advanced two-stage etch/ash machine, which uses a triboelectricized mask to direct the plasma flow, allowing for precise etching and ashing on a minute scale. The two-stage tool allows for each process step, including pre-etching, etching and ashing to be performed in individualized settings, ensuring precise and accurate results. In addition, PLASMATHERM 700 offers advanced protection systems to ensure safe and reliable operation, as well as superior quality control. This includes an innovative self-cleaning mechanism, which eliminates particulate build-up in the chamber, preventing contamination. For even greater quality, the device features inerting capabilities, allowing for the exclusion of air from the etch/ash chamber for purer results. Overall, 700 is a powerful and advanced etcher/asher asset offering flexibility and precision to meet any industrial etching or ashing needs. With the combination of its open architecture, programmable logic controller, two-stage etch/ash model and advanced protection systems, it is a reliable and efficient tool for the job.
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